Inficon Q-pod Thin Film Deposition Monitor Instrukcja Użytkownika

OPERATING MANUALQ-pod™Quartz Crystal MonitorIPN 074-547-P1B

TOC - 2 IPN 074-547-P1B Q-pod Operating ManualChapter 3Communications3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

TOC - 3IPN 074-547-P1BQ-pod Operating ManualChapter 5Calibration Procedures5.1 Importance of Density, Tooling and Z-Ratio. . . . . . . . . . . . . .

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1 - 1IPN 074-547-P1BQ-pod Operating ManualChapter 1Introduction1.1 IntroductionThe INFICON Q-pod™ Transducer is a small, inexpensive and accurate w

1 - 2 IPN 074-547-P1B Q-pod Operating Manual1.1.1 Related ManualsSensors are covered in separate manuals. PDF files of these manuals are contained i

1 - 3IPN 074-547-P1BQ-pod Operating Manual1.2.2 General Cautions and WarningsCAUTIONDo not open the instrument case! There are no user-serviceable

1 - 4 IPN 074-547-P1B Q-pod Operating Manual1.3 How to Contact INFICONWorldwide customer support information is available under Support at www.infic

1 - 5IPN 074-547-P1BQ-pod Operating ManualWeight . . . . . . . . . . . . . . . . . . . . . . . 2 oz. (32 gm) Computer Requirements . . . . . . . .

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2 - 1IPN 074-547-P1BQ-pod Operating ManualChapter 2Quick Start2.1 Install SoftwareNOTE: If this is the initial Q-pod installation on this computer,

2 - 2 IPN 074-547-P1B Q-pod Operating Manual2 Use the 6 in. BNC cable provided to connect the Q-pod to the QCM sensor feedthrough. 3 The status light

2 - 3IPN 074-547-P1BQ-pod Operating Manual2.3.1.2 Materials GridIn the right grid, edit the Density, Z-Factor and Tooling values for the materials

2 - 4 IPN 074-547-P1B Q-pod Operating Manual2.3.3 Graph DisplayFigure 2-3 Graph DisplayGraphs the deposition rate, thickness, or frequency of activ

3 - 1IPN 074-547-P1BQ-pod Operating ManualChapter 3Communications3.1 IntroductionThe Q-pod communicates via a USB (or USB2) port and a simple ASCII

3 - 2 IPN 074-547-P1B Q-pod Operating Manual3.3 QPOD.DLLQPOD.DLL is an Active-X DLL that provides the functions necessary to get rate and thickness

3 - 3IPN 074-547-P1BQ-pod Operating Manual3.3.2 FunctionsFindQpods (By Ref sSNArray(0 to 32)) [=lRtnVal]Searches for Q-pods connected to the comput

3 - 4 IPN 074-547-P1B Q-pod Operating Manual3.3.3 EventsQpodReading (sSerNum, ByRef dRdgArray(0 to 3), Time)If SetReadingsTimer (see above) is passe

3 - 5IPN 074-547-P1BQ-pod Operating ManualBefore using the LabVIEW demo, it may be best to familiarize oneself with operation of the Q-pod software.

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4 - 1IPN 074-547-P1BQ-pod Operating ManualChapter 4Troubleshooting and Maintenance4.1 Troubleshooting GuideIf the Q-pod fails to function, or appea

www.inficon.com [email protected]©2012 INFICON®OPERATING MANUALQ-pod™Quartz Crystal MonitorIPN 074-547-P1B

4 - 2 IPN 074-547-P1B Q-pod Operating Manual4.1.2 Troubleshooting the Q-podTable 4-1 General TroubleshootingSYMPTOM CAUSE REMEDY1. Crystal fail mes

4 - 3IPN 074-547-P1BQ-pod Operating Manual4.1.3 Troubleshooting SensorsNOTE: Many sensor head problems may be diagnosed with a DMM (Digital Multi-M

4 - 4 IPN 074-547-P1B Q-pod Operating ManualTable 4-2 Troubleshooting SensorsSYMPTOM CAUSE REMEDY1. Large jumps of thickness reading during depositi

4 - 5IPN 074-547-P1BQ-pod Operating Manual2. Crystal ceases to oscillate during deposition before it reaches the end of its normal life.a. Crystal s

4 - 6 IPN 074-547-P1B Q-pod Operating Manual4. Crystal oscillates in vacuum but stops oscillation after open to air.a. Crystal was near the end of it

4 - 7IPN 074-547-P1BQ-pod Operating Manual6. Poor thickness reproducibility.a. Variable source flux distribution.a. Move sensor to a more central lo

4 - 8 IPN 074-547-P1B Q-pod Operating Manual4.1.4 Troubleshooting Computer Communications4.2 Replacing the CrystalCAUTIONAlways use clean nylon lab

4 - 9IPN 074-547-P1BQ-pod Operating Manual4.2.1 Front LoadFollow the procedure below to replace the crystal in the Front Load sensor: (see Figure 4

4 - 10 IPN 074-547-P1B Q-pod Operating Manual4.2.2 Cool DrawerFollow the procedure below to replace the crystal in a Next Generation Cool Drawer™ se

4 - 11IPN 074-547-P1BQ-pod Operating ManualFigure 4-3 Cool Drawer - Replacing The CrystalOrientationNotchHandleRetainerCrystalDrawer

TrademarksThe trademarks of the products mentioned in this manual are held by the companies that produce them.Q-pod™ is a trademark of INFICON GmbH.Te

4 - 12 IPN 074-547-P1B Q-pod Operating Manual4.2.3 Bakeable SensorFor the Bakeable sensor, the procedure is the same as the Front Load sensor except

4 - 13IPN 074-547-P1BQ-pod Operating Manual4.2.4 Sputtering SensorObserve the general precautions for replacing crystals and follow the instruction

4 - 14 IPN 074-547-P1B Q-pod Operating Manual4.2.5 Crystal SnatcherUse the crystal snatcher, supplied with the sensor, as follows:1 Insert crystal s

4 - 15IPN 074-547-P1BQ-pod Operating Manual4.3 Crystal Sensor EmulatorIPN 760-601-G2NOTE: 760-601-G2 is fully compatible with all Thin Film Deposit

4 - 16 IPN 074-547-P1B Q-pod Operating Manual4.3.1 Diagnostic ProceduresThe following diagnostic procedures employ the Crystal Sensor Emulator to an

4 - 17IPN 074-547-P1BQ-pod Operating Manual4.3.1.2 Feed-Through Or In-Vacuum Cable Diagnostic Procedure1 Refer to Figure 4-8 on page 4-15. Remove t

4 - 18 IPN 074-547-P1B Q-pod Operating Manual11 Connect the six-inch BNC cable to the Feed-Through and disconnect it from the Q-pod.12 Verify electri

4 - 19IPN 074-547-P1BQ-pod Operating Manual5 Connect the In-Vacuum Cable to the Sensor Head.  Verify there is continuity (<0.2 ohm) from the lea

4 - 20 IPN 074-547-P1B Q-pod Operating Manual4.3.2 Sensor Cover ConnectionThe Crystal Sensor Emulator can be used to verify the measurement system f

4 - 21IPN 074-547-P1BQ-pod Operating Manual4.3.3 Emulator SpecificationsDimensions1.58 in. diameter x 1.79 in.(40.13 mm diameter x 45.47 mm)Tempera

DECLARATION OF CONFORMITY This is to certify that this equipment, designed and manufactured by: INFICON Inc. Two Technology Place

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5 - 1IPN 074-547-P1BQ-pod Operating ManualChapter 5Calibration Procedures5.1 Importance of Density, Tooling and Z-RatioThe quartz crystal microbala

5 - 2 IPN 074-547-P1B Q-pod Operating Manualwhere:D1 = Initial density settingTx = Thickness reading on Q-podTm = Measured thickness7 A quick check o

5 - 3IPN 074-547-P1BQ-pod Operating Manual[3][4]where:df = density (g/cm3) of deposited filmµf = shear modulus (dynes/cm2) of deposited filmdq = den

5 - 4 IPN 074-547-P1B Q-pod Operating Manualwhere:Tf = thickness of deposited film (kÅ)Fco = starting frequency of the sensor crystal (Hz)Fc = Final

6 - 1IPN 074-547-P1BQ-pod Operating ManualChapter 6Measurement and Theory6.1 BasicsThe Quartz Crystal deposition Monitor, or QCM, utilizes the piez

6 - 2 IPN 074-547-P1B Q-pod Operating Manualeffect provides a means of determining how much material is being deposited on a substrate in a vacuum sy

6 - 3IPN 074-547-P1BQ-pod Operating Manualreduces the intensity of response of the generally unwanted anharmonic modes; hence, the potential for an

6 - 4 IPN 074-547-P1B Q-pod Operating ManualFigure 6-3 Thickness Shear Displacement6.1.2 Period Measurement TechniqueAlthough instruments using equ

6 - 5IPN 074-547-P1BQ-pod Operating Manualmonitor crystal’s period is (n/Fr)/m where n is the number of counts in the second accumulator. The precis

6 - 6 IPN 074-547-P1B Q-pod Operating Manualfor a number of materials, and has been found to be valid for frequency shifts equivalent to Ff = 0.4Fq.

6 - 7IPN 074-547-P1BQ-pod Operating ManualFigure 6-5 Heavily Loaded CrystalThe crystal has lost the steep slope displayed in Figure 6-6. Because th

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PRELIMINARY 5/4/12 A - 1IPN 074-547-P1BQ-pod Operating ManualAppendix AMaterial TableA.1 IntroductionThe following Table A-1 represents the density

A - 2 PRELIMINARY 5/4/12IPN 074-547-P1B Q-pod Operating Manual BaN2O63.244 1.261 barium nitrateBaO 5.720 *1.000 barium oxideBaTiO35.999 0.464 bar

PRELIMINARY 5/4/12 A - 3IPN 074-547-P1BQ-pod Operating ManualCoO 6.440 0.412 cobalt oxideCr 7.200 0.305 chromiumCr2O35.210 *1.000 chromium (III) oxi

A - 4 PRELIMINARY 5/4/12IPN 074-547-P1B Q-pod Operating Manual Ge 5.350 0.516 germaniumGe3N25.200 *1.000 germanium nitrideGeO26.240 *1.000 german

PRELIMINARY 5/4/12 A - 5IPN 074-547-P1BQ-pod Operating ManualLiNbO34.700 0.463 lithium niobateLu 9.840 *1.000 lutetiumMg 1.740 1.610 magnesiumMgAl2O

A - 6 PRELIMINARY 5/4/12IPN 074-547-P1B Q-pod Operating Manual NiCr 8.500 *1.000 nichromeNiCrFe 8.500 *1.000 inconelNiFe 8.700 *1.000 permalloyNi

PRELIMINARY 5/4/12 A - 7IPN 074-547-P1BQ-pod Operating ManualSe 4.810 0.864 seleniumSi 2.320 0.712 siliconSi3N43.440 *1.000 silicon nitrideSiC 3.220

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the

A - 8 PRELIMINARY 5/4/12IPN 074-547-P1B Q-pod Operating Manual TiN 5.430 *1.000 titanium nitrideTiO 4.900 *1.000 titanium oxideTiO24.260 0.400 ti

PRELIMINARY 5/4/12 A - 9IPN 074-547-P1BQ-pod Operating ManualZnTe 6.340 0.770 zinc tellurideZr 6.490 0.600 zirconiumZrB26.080 *1.000 zirconium borid

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TOC - 1IPN 074-547-P1BQ-pod Operating ManualTable Of ContentsTrademarksDisclaimerCopyrightChapter 1Introduction1.1 Introduction. . . . . . . . . . .